專(zhuān)利名稱(chēng)：METAL CAPACITOR AND METHOD OF

MAKING THE SAME

發(fā)明人：Chin-Sheng Yang申請(qǐng)?zhí)枺篣S12255652申請(qǐng)日：20081021

公開(kāi)號(hào)：US20100096726A1公開(kāi)日：20100422

專(zhuān)利附圖：

摘要：A method of making a metal capacitor includes the following steps. A dielectriclayer having a metal interconnection and a capacitor electrode is provided. Then, atreatment is performed to increase the dielectric constant of the dielectric layer

surrounding the capacitor electrode. The treatment can be UV radiation, a plasmatreatment or an ion implantation. Accordingly, the metal capacitor will have a highercapacitance and RC delay between the metal interconnection and the dielectric layer canbe prevented.

申請(qǐng)人：Chin-Sheng Yang

地址：Hsinchu City TW

國(guó)籍：TW

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